Stefanov P.Shipochka M.Stefchev P.Raicheva Z.Lazarova V.Spassov L.2024-07-102024-07-102024-07-102024-07-102008-03-011742-65961742-658810.1088/1742-6596/100/1/012039SCOPUS_ID:44649151833https://rlib.uctm.edu/handle/123456789/141TiO2 layers for gas sensing applications were obtained by Liquid Phase Deposition (LPD). The layers were deposited on gold-coated piezoelectric quartz crystals. The surface structure, morphology and chemical properties were analysed by X-ray diffraction (XRD), Scanning Electron Microscopy (SEM) and X-ray Photoelectron Spectroscopy (XPS). SEM showed that the layers were porous and composed of uniform crystalline grains. XPS indicated them to be non-stoichiometric. © 2008 IOP Publishing Ltd.enXPS characterization of TiO2 layers deposited on quartz platesArticle