Stefanov P.Atanasova G.Manolov E.Raicheva Z.Lazarova V.2024-07-102024-07-102024-07-102024-07-102008-01-011742-65961742-658810.1088/1742-6596/100/8/082046SCOPUS_ID:77956872106https://rlib.uctm.edu/handle/123456789/197SnO2 thin films for gas sensing applications were deposited by RF sputtering in a mixture of oxygen and argon. The morphology, structure and composition of the SnO2 films were analysed by XRD, SEM and XPS. SnO2 thin films showed a crystalline structure with a submicron particle size of 200 nm. The electronic structure of the film surface was elucidated by analysis of the photoelectron core level and valence band spectra of Sn.enConference Paper