Durina P.Bencurova A.Konecnikova A.Kostic I.Vutova K.Koleva E.Mladenov G.Kus P.Plecenik A.2024-07-102024-07-102024-07-102024-07-102014-01-011742-65961742-658810.1088/1742-6596/514/1/012037SCOPUS_ID:84902169997https://rlib.uctm.edu/handle/123456789/308This work deals with a method of preparation of nanometer structures for a gas detector based on e-beam lithography and ion etching of a thin TiO2 film. The aim was the fabrication of a gas sensor with meander or comb structures of nanometer dimensions. This is of importance since both the size of the contacts and the layer thickness affect the sensor's sensitivity.enConference Paper