How to avoid concentration unsteadiness with a CVD precursor delivery system employing bubbler?

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creativework.publisherInstitute of Physics Publishinghelen.craven@iop.orgen
dc.contributor.authorPeev G.
dc.contributor.authorPeshev D.
dc.date.accessioned2024-07-10T14:27:03Z
dc.date.accessioned2024-07-10T14:48:35Z
dc.date.available2024-07-10T14:27:03Z
dc.date.available2024-07-10T14:48:35Z
dc.date.issued2016-11-15
dc.description.abstractAn approach of great certainty is suggested as to avoid concentration unsteadiness with a CVD delivery system employing bubbler. Assuming that the carrier gas has to be saturated of precursor vapour during the entire CVD experiment a set of equations has been selected from the literature for calculating the height of liquid layer in the bubbler which is necessary to this aim. The selection is made on the prerequisites that gas bubbles are spherical, diffusion of precursor vapour in them is molecular and it takes place during their rising only, which has a velocity equal to the terminal bubble velocity of rising. The errors at levels lower than the one for saturation are discussed. Heights of Al(CH3)3 calculated using the approach are compared to those at which the bubbler controlling LED indicator of Dow Electronic Materials lights green, amber or red.
dc.identifier.doi10.1088/1742-6596/764/1/012012
dc.identifier.issn1742-6596
dc.identifier.issn1742-6588
dc.identifier.scopusSCOPUS_ID:85002947779en
dc.identifier.urihttps://rlib.uctm.edu/handle/123456789/408
dc.language.isoen
dc.source.urihttps://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85002947779&origin=inward
dc.titleHow to avoid concentration unsteadiness with a CVD precursor delivery system employing bubbler?
dc.typeConference Paper
oaire.citation.issue1
oaire.citation.volume764
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