Browsing by Author "Kashchieva E.P."
Now showing 1 - 2 of 2
Results Per Page
Sort Options
Item Characterization and properties of highly adhesive titanium nitride and tungsten nitride thin films(2008-05-01) Martev I.N.; Dechev D.A.; Ivanov N.P.; Uzunov T.D.; Kashchieva E.P.The paper presents results on the physical characteristics and mechanical properties of titanium nitride (TiN) and tungsten nitride (W2N) thin films grown by reactive DC magnetron sputtering. The films were deposited in a system with several magnetron modules of different sputtering materials suitable for deposition of single-layer metal nitride films and multilayer nitride coatings. The deposition conditions were optimized to obtain films with the highest adhesion to substrates of machine steel and sintered hard alloy. The adhesion of the films was measured in dependence on two principal process parameters: the nitrogen partial pressure in the magnetron discharge gas mixture of nitrogen and argon and the substrate temperature. The composition of the TiN films was determined by Auger electron spectroscopy. The microstructure and the crystallization trend of the films were studied by transmission electron microscopy and selected area electron diffraction. The hardness of the films was examined using standard measuring methods. © 2008 IOP Publishing Ltd.Item Nanolaminated TiN/Mo2N hard multilayer coatings(2010-01-01) Martev I.N.; Dechev D.A.; Ivanov N.P.; Uzunov T.D.; Kashchieva E.P.The paper presents results on the synthesis of hard multilayer coatings consisting of titanium nitride and molybdenum nitride thin films with thickness of several nm. The TiN and Mo2N films were successively deposited by reactive DC magnetron sputtering. These multilayer structures were investigated by Auger electron spectroscopy (AES), transmission electron microscopy (TEM), selected area electron diffraction (SAED), X-ray diffraction (XRD), cross-section scanning electron microscopy (CSSEM) and cross-section electron probe microanalysis (CSEPMA). The mechanical properties of the multilayer coatings, namely, hardness, Young's modulus and the coefficient of plastic deformation were measured. The adhesion was evaluated by the Rockwell-C-impact test. Coatings with different total thickness were examined with respect to adhesion to substrates of tool materials. © 2010 IOP Publishing Ltd.