Nanolaminated TiN/Mo2N hard multilayer coatings
No Thumbnail Available
Date
2010-01-01
External link to pdf file
https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=77954734470&origin=inward
Journal Title
Journal ISSN
Volume Title
Publisher
Abstract
The paper presents results on the synthesis of hard multilayer coatings consisting of titanium nitride and molybdenum nitride thin films with thickness of several nm. The TiN and Mo2N films were successively deposited by reactive DC magnetron sputtering. These multilayer structures were investigated by Auger electron spectroscopy (AES), transmission electron microscopy (TEM), selected area electron diffraction (SAED), X-ray diffraction (XRD), cross-section scanning electron microscopy (CSSEM) and cross-section electron probe microanalysis (CSEPMA). The mechanical properties of the multilayer coatings, namely, hardness, Young's modulus and the coefficient of plastic deformation were measured. The adhesion was evaluated by the Rockwell-C-impact test. Coatings with different total thickness were examined with respect to adhesion to substrates of tool materials. © 2010 IOP Publishing Ltd.