Nanolaminated TiN/Mo2N hard multilayer coatings

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creativework.publisherInstitute of Physics Publishingen
dc.contributor.authorMartev I.N.
dc.contributor.authorDechev D.A.
dc.contributor.authorIvanov N.P.
dc.contributor.authorUzunov T.D.
dc.contributor.authorKashchieva E.P.
dc.date.accessioned2024-07-10T14:27:03Z
dc.date.accessioned2024-07-10T14:47:28Z
dc.date.available2024-07-10T14:27:03Z
dc.date.available2024-07-10T14:47:28Z
dc.date.issued2010-01-01
dc.description.abstractThe paper presents results on the synthesis of hard multilayer coatings consisting of titanium nitride and molybdenum nitride thin films with thickness of several nm. The TiN and Mo2N films were successively deposited by reactive DC magnetron sputtering. These multilayer structures were investigated by Auger electron spectroscopy (AES), transmission electron microscopy (TEM), selected area electron diffraction (SAED), X-ray diffraction (XRD), cross-section scanning electron microscopy (CSSEM) and cross-section electron probe microanalysis (CSEPMA). The mechanical properties of the multilayer coatings, namely, hardness, Young's modulus and the coefficient of plastic deformation were measured. The adhesion was evaluated by the Rockwell-C-impact test. Coatings with different total thickness were examined with respect to adhesion to substrates of tool materials. © 2010 IOP Publishing Ltd.
dc.identifier.doi10.1088/1742-6596/223/1/012019
dc.identifier.issn1742-6596
dc.identifier.issn1742-6588
dc.identifier.scopusSCOPUS_ID:77954734470en
dc.identifier.urihttps://rlib.uctm.edu/handle/123456789/193
dc.language.isoen
dc.source.urihttps://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=77954734470&origin=inward
dc.titleNanolaminated TiN/Mo2N hard multilayer coatings
dc.typeConference Paper
oaire.citation.issue1
oaire.citation.volume223
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